Application scenario: Automatic wafer inspection system applied to silicon wafer manufacturing process
Product features
– Modular design
– Compact seal
– High cleanliness, high reliability, high precision
– Transmission vibration suppression control
– Visual inspection motion control
Core Technology
– Communication interface adaptation technology
– Dual-Arm control technology
– Wafer mapping technology
– Wafer 360 ° rotation control
– Wafer surface light source detection
– Simplified operation and maintenance management platform