Application: Clean transfer of glass substrates for LCD, OLED, Mini/Micro LED display manufacturing core processes
Product features
– Modular design
– Standard interface
– Lightweight design
– High cleanliness seal design
– High speed, high precision, smooth transfer
– Multiple substrates transfer simultaneously to save tact time
Core Technology
– Vibration suppression of large substrate transfer
– High cleanliness sealing and purification design
– Variable acceleration control based on position feedback
– Fault diagnosis and prediction
Specifications
Robot Model |
svv-143 series |
svv-184 series |
svv-9L2 series |
svv-9H5 series |
svv-581 series |
|
Robot Type |
Cylindrical Type |
Support Beam Type |
Support Beam Type |
Support Beam Type |
Support Beam Type |
|
Transportable Generation |
Generation |
4.5Gand below |
5.5G |
6G |
8.5G |
10.5G |
Substrate Size |
370x470~730x920 mm |
1300x1500 mm |
1500x1850 mm |
2200x2500 mm |
2940x3370 mm |
|
The Thickness of the Substrate |
0.4~1.4 mm |
0.4~1.4 mm |
0.4~1.4 mm |
0.4~1.4 mm |
0.4~1.4 mm |
|
Working Range |
Horizontal Movement |
0~10200 mm |
0~11150 mm |
0~11700 mm |
0~15700 mm |
0~18600 mm |
Vertical Lift |
0~1000 mm |
0~2400 mm |
0~4300 mm |
0~4700 mm |
0~6200 mm |
|
Telescopic Arm |
-815~930 mm |
-1615~1600 mm |
-1700~1680 mm |
-2300~2300 mm |
-2925~2875 mm |
|
Rotation Angle |
0°~370° |
0°~370° |
0°~370° |
0°~370° |
0°~370° |
|
Maximum Speed |
Horizontal axis |
2300 mm/s |
2000 mm/s |
2000 mm/s |
2000 mm/s |
2300 mm/s |
Vertical Axis |
800 mm/s |
900 mm/s |
1000 mm/s |
1200 mm/s |
1300 mm/s |
|
Arm Telescopic Shaft |
2500 mm/s |
3150 mm/s |
3800 mm/s |
4600 mm/s |
5000 mm/s |
|
Rotation Axis |
157°/s |
90°/s |
90°/s |
60°/s |
90°/s |
|
Main Performance |
Repeatability |
±0.2 mm |
±0.2 mm |
±0.2 mm |
±0.25 mm |
±0.25 mm |
Maximum load (including unexecuted end) |
15 kg |
50 kg |
50 kg |
65 kg |
150 kg |
|
Heat resistant temperature at the end |
normal atmospheric temperature~450 ℃ |
|||||
Cleanliness |
Class 10(0.3 um) |
Class 10(0.3 um) |
Class 10 (0.3 um) |
Class 10(0.3 um) |
Class 10 (0.3 pum) |
|
Operation noise |
≤80 dB |
≤85 dB |
≤85 dB |
≤85 dB |
≤85 dB |
|
Operating Environment |
Temperature |
0~40 ℃ |
0~40 ℃ |
0~40℃ |
0~40 ℃ |
0~40 ℃ |
Humidity |
30~90% RH |
30~90% RH |
30~90% RH |
30~90% RH |
30~90%RH |
|
Power supply(three-phase) |
AC200~230V±10% |
AC200~230V±10% |
AC200~230V±10% |
AC200~230V±10% |
AC200~230V±10% |
|
Vacuum Source |
-70 kPa |
-70 kPa |
-70 kPa |
-70 kPa |
-70 kPa |
Specifications
Robot Model |
svv-143 series |
svv-184 series |
svv-9L2 series |
svv-9H5 series |
svv-581 series |
|
Robot Type |
Cylindrical Type |
Support Beam Type |
Support Beam Type |
Support Beam Type |
Support Beam Type |
|
Transportable Generation |
Generation |
4.5Gand below |
5.5G |
6G |
8.5G |
10.5G |
Substrate Size |
370x470~730x920 mm |
1300x1500 mm |
1500x1850 mm |
2200x2500 mm |
2940x3370 mm |
|
The Thickness of the Substrate |
0.4~1.4 mm |
0.4~1.4 mm |
0.4~1.4 mm |
0.4~1.4 mm |
0.4~1.4 mm |
|
Working Range |
Horizontal Movement |
0~10200 mm |
0~11150 mm |
0~11700 mm |
0~15700 mm |
0~18600 mm |
Vertical Lift |
0~1000 mm |
0~2400 mm |
0~4300 mm |
0~4700 mm |
0~6200 mm |
|
Telescopic Arm |
-815~930 mm |
-1615~1600 mm |
-1700~1680 mm |
-2300~2300 mm |
-2925~2875 mm |
|
Rotation Angle |
0°~370° |
0°~370° |
0°~370° |
0°~370° |
0°~370° |
|
Maximum Speed |
Horizontal axis |
2300 mm/s |
2000 mm/s |
2000 mm/s |
2000 mm/s |
2300 mm/s |
Vertical Axis |
800 mm/s |
900 mm/s |
1000 mm/s |
1200 mm/s |
1300 mm/s |
|
Arm Telescopic Shaft |
2500 mm/s |
3150 mm/s |
3800 mm/s |
4600 mm/s |
5000 mm/s |
|
Rotation Axis |
157°/s |
90°/s |
90°/s |
60°/s |
90°/s |
|
Main Performance |
Repeatability |
±0.2 mm |
±0.2 mm |
±0.2 mm |
±0.25 mm |
±0.25 mm |
Maximum load (including unexecuted end) |
15 kg |
50 kg |
50 kg |
65 kg |
150 kg |
|
Heat resistant temperature at the end |
normal atmospheric temperature~450 ℃ |
|||||
Cleanliness |
Class 10(0.3 um) |
Class 10(0.3 um) |
Class 10 (0.3 um) |
Class 10(0.3 um) |
Class 10 (0.3 pum) |
|
Operation noise |
≤80 dB |
≤85 dB |
≤85 dB |
≤85 dB |
≤85 dB |
|
Operating Environment |
Temperature |
0~40 ℃ |
0~40 ℃ |
0~40℃ |
0~40 ℃ |
0~40 ℃ |
Humidity |
30~90% RH |
30~90% RH |
30~90% RH |
30~90% RH |
30~90%RH |
|
Power supply(three-phase) |
AC200~230V±10% |
AC200~230V±10% |
AC200~230V±10% |
AC200~230V±10% |
AC200~230V±10% |
|
Vacuum Source |
-70 kPa |
-70 kPa |
-70 kPa |
-70 kPa |
-70 kPa |