Clean Transfer Robots_Hefei Sineva Intelligent Machine Co.,Ltd.

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Clean Transfer Robots

Application: Clean transfer of glass substrates for LCD, OLED, Mini/Micro LED display manufacturing core processes

Product features

– Modular design

– Standard interface

– Lightweight design

– High cleanliness seal design

– High speed, high precision, smooth transfer

– Multiple substrates transfer simultaneously to save tact time

Core Technology

– Vibration suppression of large substrate transfer

– High cleanliness sealing and purification design

– Variable acceleration control based on position feedback

– Fault diagnosis and prediction

Specifications

Robot Model		svv-143 series	svv-184 series	svv-9L2 series	svv-9H5 series	svv-581 series
Robot Type		Cylindrical Type	Support Beam Type	Support Beam Type	Support Beam Type	Support Beam Type
Transportable Generation	Generation	4.5Gand below	5.5G	6G	8.5G	10.5G
	Substrate Size	370x470~730x920 mm	1300x1500 mm	1500x1850 mm	2200x2500 mm	2940x3370 mm
	The Thickness of the Substrate	0.4~1.4 mm	0.4~1.4 mm	0.4~1.4 mm	0.4~1.4 mm	0.4~1.4 mm
Working Range	Horizontal Movement	0~10200 mm	0~11150 mm	0~11700 mm	0~15700 mm	0~18600 mm
	Vertical Lift	0~1000 mm	0~2400 mm	0~4300 mm	0~4700 mm	0~6200 mm
	Telescopic Arm	-815~930 mm	-1615~1600 mm	-1700~1680 mm	-2300~2300 mm	-2925~2875 mm
	Rotation Angle	0°~370°	0°~370°	0°~370°	0°~370°	0°~370°
Maximum Speed	Horizontal axis	2300 mm/s	2000 mm/s	2000 mm/s	2000 mm/s	2300 mm/s
	Vertical Axis	800 mm/s	900 mm/s	1000 mm/s	1200 mm/s	1300 mm/s
	Arm Telescopic Shaft	2500 mm/s	3150 mm/s	3800 mm/s	4600 mm/s	5000 mm/s
	Rotation Axis	157°/s	90°/s	90°/s	60°/s	90°/s
Main Performance	Repeatability	±0.2 mm	±0.2 mm	±0.2 mm	±0.25 mm	±0.25 mm
	Maximum load (including unexecuted end)	15 kg	50 kg	50 kg	65 kg	150 kg
	Heat resistant temperature at the end	normal atmospheric temperature~450 ℃
	Cleanliness	Class 10(0.3 um)	Class 10(0.3 um)	Class 10 (0.3 um)	Class 10(0.3 um)	Class 10 (0.3 pum)
	Operation noise	≤80 dB	≤85 dB	≤85 dB	≤85 dB	≤85 dB
Operating Environment	Temperature	0~40 ℃	0~40 ℃	0~40℃	0~40 ℃	0~40 ℃
Operating Environment	Humidity	30~90% RH	30~90% RH	30~90% RH	30~90% RH	30~90%RH
Power supply（three-phase)		AC200~230V±10%	AC200~230V±10%	AC200~230V±10%	AC200~230V±10%	AC200~230V±10%
Vacuum Source		-70 kPa	-70 kPa	-70 kPa	-70 kPa	-70 kPa

Specifications

Robot Model		svv-143 series	svv-184 series	svv-9L2 series	svv-9H5 series	svv-581 series
Robot Type		Cylindrical Type	Support Beam Type	Support Beam Type	Support Beam Type	Support Beam Type
Transportable Generation	Generation	4.5Gand below	5.5G	6G	8.5G	10.5G
	Substrate Size	370x470~730x920 mm	1300x1500 mm	1500x1850 mm	2200x2500 mm	2940x3370 mm
	The Thickness of the Substrate	0.4~1.4 mm	0.4~1.4 mm	0.4~1.4 mm	0.4~1.4 mm	0.4~1.4 mm
Working Range	Horizontal Movement	0~10200 mm	0~11150 mm	0~11700 mm	0~15700 mm	0~18600 mm
	Vertical Lift	0~1000 mm	0~2400 mm	0~4300 mm	0~4700 mm	0~6200 mm
	Telescopic Arm	-815~930 mm	-1615~1600 mm	-1700~1680 mm	-2300~2300 mm	-2925~2875 mm
	Rotation Angle	0°~370°	0°~370°	0°~370°	0°~370°	0°~370°
Maximum Speed	Horizontal axis	2300 mm/s	2000 mm/s	2000 mm/s	2000 mm/s	2300 mm/s
	Vertical Axis	800 mm/s	900 mm/s	1000 mm/s	1200 mm/s	1300 mm/s
	Arm Telescopic Shaft	2500 mm/s	3150 mm/s	3800 mm/s	4600 mm/s	5000 mm/s
	Rotation Axis	157°/s	90°/s	90°/s	60°/s	90°/s
Main Performance	Repeatability	±0.2 mm	±0.2 mm	±0.2 mm	±0.25 mm	±0.25 mm
	Maximum load (including unexecuted end)	15 kg	50 kg	50 kg	65 kg	150 kg
	Heat resistant temperature at the end	normal atmospheric temperature~450 ℃
	Cleanliness	Class 10(0.3 um)	Class 10(0.3 um)	Class 10 (0.3 um)	Class 10(0.3 um)	Class 10 (0.3 pum)
	Operation noise	≤80 dB	≤85 dB	≤85 dB	≤85 dB	≤85 dB
Operating Environment	Temperature	0~40 ℃	0~40 ℃	0~40℃	0~40 ℃	0~40 ℃
Operating Environment	Humidity	30~90% RH	30~90% RH	30~90% RH	30~90% RH	30~90%RH
Power supply（three-phase)		AC200~230V±10%	AC200~230V±10%	AC200~230V±10%	AC200~230V±10%	AC200~230V±10%
Vacuum Source		-70 kPa	-70 kPa	-70 kPa	-70 kPa	-70 kPa