Product features
– Standardization, modularization
– Rate stability ≤±2%
– Film thickness repeatability ≤3%
– Film uniformity ≤3%
– Compatible with multiple substrate types
Core technology
– Vacuum R2R System Design Technology
– Roll-System Tension Stability Control Technology
– High-Precision & High-Speed Stability Control Technology
– Automatic Edge Position Control (EPC) Technology
– Auto PID Control Technology
– High-Vacuum Roll-to-Roll Deposition Technology