Product features
– Compatible with glass and wafer evaporation
– Inline Type
– Standardization
– Modularization
– High uniformity of film formation
– High film thickness stability
– High rate stability
Core Technology
– Evaporation simulation technology
– Customized products can be configured with point sources or electron beams
– With Auto PID, the evaporation is stable and the film is evenly formed
– log analysis technology
– The product is mature and the operation is stable