Product features

– Using solid-state lasers, stable operation and low maintenance costs

– Can clean 4-8 inch wafers and support platform replacement

– Multiple customer cleaning verifications with low damage and high yield during cleaning

– Monitor the status of the laser to ensure consistent processing quality

– Support for Flat and PSS epitaxial structure LED cleaning operations

Core Technology

– Specific pulse width control vaporizes Ga while avoiding destruction of the luminescence layer

– Visually edits the cleaning position