Product features
– High cleanliness, high precision, high reliability
– Drawer-type pull-out Manual Port
– Provide customized system for 2-4Port
– 6-12 buffers can be configured as required
– SEMI Standard Compliance, can interact with the Fab system data, and connect to the OHT system based on the E84 communication protocol
Core Technology
– High precision, high reliability,high cleanliness
– Vibration suppression technology