Clean Transfer Robots

Application: Clean transfer of glass substrates for LCD, OLED, Mini/Micro LED display manufacturing core processes

Product features



– Modular design

– Standard interface

– Lightweight design

– High cleanliness seal design

– High speed, high precision, smooth transfer

– Multiple substrates transfer simultaneously to save tact time



Core Technology



– Vibration suppression of large substrate transfer

– High cleanliness sealing and purification design

– Variable acceleration control based on position feedback

– Fault diagnosis and prediction



Specifications



Robot Model
svv-143 series


svv-184 series



svv-9L2 series



svv-9H5 series


svv-581 series
Robot Type
Cylindrical Type
Support Beam Type
Support Beam Type
Support Beam Type
Support Beam Type

Transportable Generation

Generation
4.5Gand below
5.5G
6G
8.5G
10.5G
Substrate Size
370x470~730x920 mm
1300x1500 mm
1500x1850 mm
2200x2500 mm
2940x3370 mm
The Thickness of the Substrate
0.4~1.4 mm
0.4~1.4 mm
0.4~1.4 mm
0.4~1.4 mm
0.4~1.4 mm

Working Range

Horizontal Movement
0~10200 mm
0~11150 mm
0~11700 mm
0~15700 mm
0~18600 mm
Vertical Lift
0~1000 mm
0~2400 mm
0~4300 mm
0~4700 mm
0~6200 mm
Telescopic Arm
-815~930 mm
-1615~1600 mm
-1700~1680 mm
-2300~2300 mm
-2925~2875 mm
Rotation Angle
0°~370°
0°~370°
0°~370°
0°~370°
0°~370°

Maximum Speed

Horizontal axis
2300 mm/s
2000 mm/s
2000 mm/s
2000 mm/s
2300 mm/s
Vertical Axis
800 mm/s
900 mm/s
1000 mm/s
1200 mm/s
1300 mm/s
Arm Telescopic Shaft
2500 mm/s
3150 mm/s
3800 mm/s
4600 mm/s
5000 mm/s
Rotation Axis
157°/s
90°/s
90°/s
60°/s
90°/s

Main Performance

Repeatability
±0.2 mm
±0.2 mm
±0.2 mm
±0.25 mm
±0.25 mm
Maximum load (including unexecuted end)
15 kg
50 kg
50 kg
65 kg
150 kg
Heat resistant temperature at the end
normal atmospheric temperature~450 ℃
Cleanliness
Class 10(0.3 um)
Class 10(0.3 um)
Class 10 (0.3 um)
Class 10(0.3 um)
Class 10 (0.3 pum)
Operation noise
≤80 dB
≤85 dB
≤85 dB
≤85 dB
≤85 dB

Operating Environment

Temperature
0~40 ℃
0~40 ℃
0~40℃
0~40 ℃
0~40 ℃
Humidity
30~90% RH
30~90% RH
30~90% RH
30~90% RH
30~90%RH
Power supply(three-phase) AC200~230V±10%
AC200~230V±10%
AC200~230V±10%
AC200~230V±10%
AC200~230V±10%
Vacuum Source -70 kPa
-70 kPa
-70 kPa
-70 kPa
-70 kPa


Specifications



Robot Model
svv-143 series


svv-184 series



svv-9L2 series



svv-9H5 series


svv-581 series
Robot Type
Cylindrical Type
Support Beam Type
Support Beam Type
Support Beam Type
Support Beam Type

Transportable Generation

Generation
4.5Gand below
5.5G
6G
8.5G
10.5G
Substrate Size
370x470~730x920 mm
1300x1500 mm
1500x1850 mm
2200x2500 mm
2940x3370 mm
The Thickness of the Substrate
0.4~1.4 mm
0.4~1.4 mm
0.4~1.4 mm
0.4~1.4 mm
0.4~1.4 mm

Working Range

Horizontal Movement
0~10200 mm
0~11150 mm
0~11700 mm
0~15700 mm
0~18600 mm
Vertical Lift
0~1000 mm
0~2400 mm
0~4300 mm
0~4700 mm
0~6200 mm
Telescopic Arm
-815~930 mm
-1615~1600 mm
-1700~1680 mm
-2300~2300 mm
-2925~2875 mm
Rotation Angle
0°~370°
0°~370°
0°~370°
0°~370°
0°~370°

Maximum Speed

Horizontal axis
2300 mm/s
2000 mm/s
2000 mm/s
2000 mm/s
2300 mm/s
Vertical Axis
800 mm/s
900 mm/s
1000 mm/s
1200 mm/s
1300 mm/s
Arm Telescopic Shaft
2500 mm/s
3150 mm/s
3800 mm/s
4600 mm/s
5000 mm/s
Rotation Axis
157°/s
90°/s
90°/s
60°/s
90°/s

Main Performance

Repeatability
±0.2 mm
±0.2 mm
±0.2 mm
±0.25 mm
±0.25 mm
Maximum load (including unexecuted end)
15 kg
50 kg
50 kg
65 kg
150 kg
Heat resistant temperature at the end
normal atmospheric temperature~450 ℃
Cleanliness
Class 10(0.3 um)
Class 10(0.3 um)
Class 10 (0.3 um)
Class 10(0.3 um)
Class 10 (0.3 pum)
Operation noise
≤80 dB
≤85 dB
≤85 dB
≤85 dB
≤85 dB

Operating Environment

Temperature
0~40 ℃
0~40 ℃
0~40℃
0~40 ℃
0~40 ℃
Humidity
30~90% RH
30~90% RH
30~90% RH
30~90% RH
30~90%RH
Power supply(three-phase) AC200~230V±10%
AC200~230V±10%
AC200~230V±10%
AC200~230V±10%
AC200~230V±10%
Vacuum Source -70 kPa
-70 kPa
-70 kPa
-70 kPa
-70 kPa


Message
Message board