Product features

– The transfer accuracy reaches micron level, and the spot size reaches millimeter level

– The repeated positioning accuracy of the XY axis on the sports platform reaches the nanometer level

– Optical mask rotation design, adjustable spot direction

– The level of the upper and lower platform can be a utomatically adjusted, and the adjustment accuracy is micron level

– The donor platform can correspond to 4 and 6 inch wafers or carrier boards

– Receptor motion platform supports substrate 470 * 370mm substrate

Core Technology

– Independently designed optical path system

– Customized spot size

– High-precision motion alignment platform

– Online spot analysis

– Precise transfer distance control