Product features

– High cleanliness, high precision, high reliability

– Drawer-type pull-out Manual Port

– Provide customized system for 2-4Port

– 6-12 buffers can be configured as required

– SEMI Standard Compliance, can interact with the Fab system data, and connect to the OHT system based on the E84 communication protocol

Core Technology

– High precision, high reliability，high cleanliness

– Vibration suppression technology