Back to list
Application: Widely used in semiconductor chip production, packaging and silicon wafer manufacturing industry. It is used together with the process equipment to load and unload the wafer. The number and function of different ports can be configured according to the production capacity and process requirements. The E84 module can be configured and it can interface with the OHT system in the factory
Product features
– High cleanliness, high reliability
– High transmission speed
– High repeatable positioning accuracy
– N₂Purge system & anti-corrosion design
– Fast set up
Core Technology
– High cleanliness control technology
– Purification design technique
– Smooth and rapid handling vibration control technology
– Anti-corrosion technology
– N₂ Purge technology
– Technology of forcing exhaust corrosive gas
Add me on Wechat
- About Us
- Company Profile
- Development History
- Company Honor
- Technology Advantage
- Sustainable development
- Main Products
- Pan-semiconductor Transfer Equipment
- Pan-semiconductor Process Equipment
- Pan-semiconductor Inspection Equipment
- Industrial Software And Big Data
- Core Components
- Contact us
-
Telephone：0551-68122312
Sales Email：sales@sineva.com.cn
HR Email：hfzp@sineva.com.cn
Address：
Between Southwest of Longzihu Rd and Jingshan Rd, Xinzhan Zone, Hefei, Anhui, 230012, China
Block 10JDB Tech Park No.18 Kechuang 10th Street BDA Beijing 100176, China
Copyright © Hefei Sineva Intelligent Machine Co.,Ltd Disclaimer Anhui ICP No.14018951 Business License
Technical Support：IBWCopyright © Hefei Sineva Intelligent Machine Co.,Ltd
Disclaimer Anhui ICP No.14018951
Business License